| 摘要 |
PURPOSE:To prevent the abnormal growth in a beveling part and to obtain a superior-quality epitaxial layer in a sliding boat method by forming a protective film on the surface of the beveling part of a circular base plate and thereafter bringing it into contact with a soln. for growth. CONSTITUTION:A protective film is formed on the surface of a beveling part 10 which is formed to the circumferential edge part of a circular base plate 9 recessed into a recessing part for holding the base plate that is provided on the surface of a holder 2 for the base plate. Then the above-mentioned base plate 9 is brought into contact with a soln. 12 for growth by means of a sliding boat method. Thereby an epitaxial layer 13 is formed only on the surface of the circular base plate 9 wherein the protective film 11 is not formed.
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