| 摘要 |
PURPOSE:To simplify stages and to obtain a light guide which decreases leakage by forming a desired groove pattern on a substrate surface and filling the grooves with a gel-like material obtd. by hydrolyzing metal alkoxide, then subjecting the material to thermal oxidation, thereby executing the thermal oxidation of the Si substrate surface and the vitrification of the gel-like material simultaneously. CONSTITUTION:After the grooves are formed by anisotropic etching on the Si substrate 1, the grooves are filled by the gel-like material 4 obtd. by hydrolyzing the metal alkoxide. The upper part of the gel-like material obtd. by hydrolyzing the metal alkoxide is built up to a semi-circular shape at this time, as said material shrinks by about 10-20% when vitrified. After the gel-like material obtd. by hydrolyzing the metal alkoxide is filled in the groves, said material is thermally oxidized in a thermal oxidation furnace to form an SiO2 layer to serve as a clad layer on the groove surface and, at the same time, to vitrify the gel-like material obtd. by hydrolyzing the metal alkoxide, by which a light guide layer 3 is formed. The guide which deceases light leakage is thereby obtd. |
