| 摘要 |
PURPOSE:To reduce loss upon initial load operation, light load operation or the like, by providing a converter unit with a function capable of converting power source voltage. CONSTITUTION:An FR generator, employed for the power source unit of a plasma generator, a heating device or the like, consists of a power amplifying unit A, a driving unit B for driving the power amplifying unit B, an oscillator D, a control unit F, a detecting circuit P.D, detecting a traveling wave power Pf and a reflecting power Pr, and a conveter unit G. The converter unit G is capable of AC-DC-AC-DC conversion in order to supply a power source voltage Vcc to the driving unit B. The output voltage Vcc of the power source is a voltage determined in accordance with the traveling wave power Pf and a set signal Ef; therefore, a power amplifying unit A is operated with the maximum efficiency at all times.
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