| 摘要 |
PURPOSE:To make it possible to easily attach a probe card having a different size without increasing the number of connector blocks by a method wherein a means, with which the position of connector is set at the position corresponding to the size of the material to be measured by sliding the position of the connector to be coupled to the connector pin of the probe card suited for use when the size of the material to be measured is different, is provided. CONSTITUTION:When the IC formed on the wafer of 6 inches is measured, a spring screw 10 is inserted into the first hole A, it is screwed up, then the probe card 5 corresponding to 6 inches is attached to a connector 7, and the measurement of IC is performed. When a 4-inch wafer is measured after a 6-inch wafer, the probe card corresponding to 6-inch is removed, the spring screw 10 is inserted into the third hole C by sliding the connector 7 attached to a shaft 8. At this point, the connector 7 is fixed by screwing in the spring screw 10, the probe card corresponding to 4 inches is attached to the connector 7, and an IC measurement is performed. As a result, a probe device with which the probe card of the desired size can be retained easily can be obtained.
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