| 摘要 |
PURPOSE:To easily form a coat of a high quality heat resistant material when a heat esistant material such as nitride or carbide is formed on the surface of a base material by CVD, by preheating gaseous starting material with a heating element placed just above the surface of the base material. CONSTITUTION:A heating element 5 made of a high m.p. metal such as W or Ta is placed above a base material 4 to be coated with a heat resistant material in a vacuum vessel 1 and the element 5 is heated to 1,500-2,000 deg.C by supplying electric current. Gaseous starting material (e.g., a gaseous SiCl4- CH4-H2 mixture in case where the heat resistant material for coating is SiC) is introduced into the vessel 1 from the upper inlet 3. The introduced starting material is excited by heating the hot heating element 3 and brought into a reaction on the base material 4 heated to 700-1,000 deg.C by the radiant heat of the element 3 to form a layer of a heat resistant material. Thus, a coat of a heat resistant material such as Si3N4, SiC, B4C, BN or AlN can be stably formed by selecting gaseous starting material used.
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