| 摘要 |
PURPOSE:To distribute uniformly an evaporated material over a prescribed area of a substrate by providing plural electrodes between an ionizing region where part of the evaporated material is ionized and the substrate to enable application of required kinetic energy to the evaporated material. CONSTITUTION:The material 16 in a crucible 15 is heated and ejected into a high vacuum from an ejection nozzle 14. The ejected vapor is partly ionized in an ionizing region 22. The ionized and evaporated material is accelerated by an accelerating electrode 23 and an intermediate electrode 29 provided between said electrode and a shielding electrode 21 and required kinetic energy is given. The evaporated material is uniformly distributed over the prescribed area of a substrate 25. |
