| 摘要 |
PURPOSE:To prevent sputtering by arc discharge from degrading the quality of a thin film by constituting a power supply circuit of a sputtering device of a rectifier circuit of an AC power source, smoothing circuit, filter circuit and series resistance to load. CONSTITUTION:Glow discharge by an inert gas is generated between the target and substrate in the sputtering device 6 and the thin film of the target material is formed on the substrate surface. The power supply 1 of this device is constitute of a transformer 2 which boosts commercial AC, the current rectifier circuit 3 which converts high-voltage AC to DC,the smoothing circuit 4 which converts the rectified pulsating current to ordinary DC, the filter circuit 5 which absorbs the surge current when an arc spot is generated and the resistor 7 connected in series to the sputtering device 6 as the load. An inverted L-shaped circuit consisting of a resistor 51 and a capacitor 52 is used for the filter circuit 5 or a choke coil is used in the inverted L- or T-shaped circuit in place of the resistor 51. The smoothing circuit 4 is constituted of the inverted L-shaped circuit consisting of the choke coil 41 and the capacitor 42 or the circuit connected with plural high-capacity capacitors in parallel.
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