发明名称 DEVICE FOR REGULATING QUANTITY OF LIGHT
摘要 PURPOSE:To enable excellent regulation with good reproducibility for the quan tity of light, by setting/controlling a relation, which is between timing of optical path closing operation of a shutter and timing of luminous power of a pulse light source, and the quantity of light per one pulse operation of the light source in consideration of the quantity of energy needed for an irradiated object. CONSTITUTION:Quantity of light radiated on an object BC per one pulse opera tion of a pulse light source, and timing of a start in a closing operation of a shutter means BB are respectively determined on the basis of output capacity of the pulse light source BA, the quantity of light needed for the object BC (appropriate quantity of exposure), and operational characteristics of the shutter means BB. On the other hand, pulse output of a pulse light source BA is operat ed at proper timing after the opening operation of the shutter means BB. The determined quantity of light per one pulse operation of the pulse light source is inputted to a first controlling means BE so that the quantity of each pulse light radiated on the object BC is controlled. On the other hand, timing of start in the closing operation is inputted to a second controlling means BF so that the closing operation for the shutter means BB is controlled. Thus, the quantity of light radiated on the object BC can be regulated as needed.
申请公布号 JPS63190332(A) 申请公布日期 1988.08.05
申请号 JP19870021677 申请日期 1987.02.03
申请人 NIKON CORP 发明人 TANIMOTO SHOICHI
分类号 H01L21/30;G03F7/20;H01L21/027;H01S3/10 主分类号 H01L21/30
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