| 摘要 |
PURPOSE:To improve the flexibility and the sticking property of the titled composition, and top reduce the swelling of said composition at an unexposed part, at the time of developing by incorporating a specified acrylic resin composition and quinone diazide compd. in a prescribed weight ratio in the titled composition. CONSTITUTION:The titled composition contains at least one kind of the acrylic resin composition which is shown by formula I or III and has a side chain, and the quinone diazide compd. in the solid weight ratio of 100pts.wt. to (5-150) pts.wt. In the formulas, A is a repeating unit shown by formula II, R3 is ethylene or propylene group, R4 is 2-7C alkylene group, R5 is 2-5C alkylene group, (k) is 1-10, (l) is 2-50, R7 is 5-10C aliphatic hydrocarbon, 6-7C alicyclic hydrocarbon, or 6-13C aromatic hydrocarbon group, R8 is 1-30C aliphatic hydrocarbon or 6-13C aromatic hydrocarbon group, B is a group shown by formula IV, (m) or (n) is 0 or 1, D is a repeating unit shown by formula V, R9 is ethylene or propylene group, R10 is 2-7C alkylene group, R11 is 2-5C alkylene group, (p) is 1-10, (q) is 20, E is carboxylic acid or sulfonic acid group, etc.
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