| 摘要 |
PURPOSE:To realize carrying out/in of substrates without touching by forming the captioned device, which carries out/in a semiconductor substrate from and to a stocker, so as to advance or retreat a handler, with a substrate supporter which has a tapered face opening upward, under the vertically movable stocker when it is moving upward. CONSTITUTION:After a stocker 2' is elevated by means of an elevator 4, a handler 3' is advanced under the stocker 2' and a substrate supporter 5 is positioned right under a substrate 1a. Then, the stocker 2' is lowered by means of the elevator 4 until the substrate 1a of the lowest stage is placed on the supporter 5. Subsequently, the handler 3' is retreated. Thus, the substrate 1a is drawn out by means of the supporter 5 which forms a tapered face opening upward. Housing is performed reversely. Due to this structure, the substrate can be carried out/in without touching it. |
