发明名称 HERMETIC STRUCTURE IN VAPOR SOURCE CRUCIBLE
摘要 PURPOSE:To hermetically maintain the airtightness of the contact parts between the peripheral edge in the aperture part of a vapor source crucible and cap without having possibility of deterioration by holding a high melting metal sheet in place in the above-mentioned contact parts and putting the cap thereon. CONSTITUTION:This vapor source crucible for vacuum deposition consists of the vapor source crucible 11 for containing a sample and the cap 13 having a small hole 14 for injection of vapor. The external screw provided on a projecting edge 13 in the upper part of the crucible 11 of the above-mentioned vapor source crucible is engaged with the internal screw provided to a downward facing edge 15 of the cap 13 and the cap 13 is put on the crucible 11. The high melting metal sheet 18 is held in place between the contact part 16 at the peripheral edge in the aperture of the crucible 11 and the contact part 17 of the cap 13 to maintain the airtightness. The above-mentioned contact parts 16, 17 are preferably formed to the sectional shape of a projecting arc or acute-angled projecting shape. Also, the above-mentioned high melting metal sheet 18 has preferably 0.1-0.5mm thickness and the material thereof is adequately gold or platinum.
申请公布号 JPS63190163(A) 申请公布日期 1988.08.05
申请号 JP19870021599 申请日期 1987.01.31
申请人 SUMITOMO ELECTRIC IND LTD 发明人 YOSHIDA NORIYUKI
分类号 C23C14/24 主分类号 C23C14/24
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