| 摘要 |
PURPOSE:To prevent the occurrence of overrun and the like, by a method wherein, a conveying device for a semiconductor substrate and the like, a plate partially provided with a detecting pert is rotated togetherwith a drive device, and when the detecting part is detected in a non-contact manner, a device is stopped in s discharge position. CONSTITUTION:When a container 2 containing a glass substrate is situated in a start position, a notch 51 of a plate 50 is positioned this side of a detecting means 52, and a light shield plate 61 is positioned facing 8 preliminary detecting means 63. Through drive of a chain 9, the container 2 is moved toward a discharge position C. In this case, the plate 50 is also rotated togetherwith the chain 9. When the container 2 is collided with a contact part 18B, rotation member 18 is rotated, and when the container enters a conveying means, the light shield plate 61 is separated away from the preliminary detecting means 63 to output a signal to a control means. A notch part 51 is detected by a detecting means 52, a signal is outputted to a control means, and a device is stopped. This constitution enables the device to be accurately stopped in a discharge position. |
