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发明名称
Apparatus for Carrying Out an Etching Process
摘要
申请公布号
GB1194748(A)
申请公布日期
1970.06.10
申请号
GB19670056947
申请日期
1967.12.13
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
分类号
B01D9/00;B01F1/00;C23F1/46
主分类号
B01D9/00
代理机构
代理人
主权项
地址
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