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发明名称
METHOD FOR FORMING MICROPATTERN
摘要
申请公布号
EP0091651(B1)
申请公布日期
1988.08.03
申请号
EP19830103348
申请日期
1983.04.06
申请人
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
发明人
TAMAMURA, TOSHIAKI;IMAMURA, SABURO;MORITA, MASAO;KOGURE, OSAMU
分类号
G03F7/075;G03F7/26;G03F7/36;G03F7/38;(IPC1-7):G03F7/10
主分类号
G03F7/075
代理机构
代理人
主权项
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