发明名称 GALLIUM ARSENIDE TRANSISTOR
摘要 PURPOSE:To realize a GaAsFET having low source resistance and high breakdown strength between a gate and a drain by making the thickness of an active layer between the gate and a source larger than that of the active layer between the gate and the drain. CONSTITUTION:In a GaAsFET consisting of a GaAs active layer 1, a source electrode 2, a gate electrode 3 and a drain electrode 4, the thickness a1 of the active layer between a gate and a source and the thickness a2 of the active layer between the gate and a drain are set to a1>a2. According to such constitution, the GaAsFET having low source resistance and high breakdown strength between the gate and the drain can be acquired.
申请公布号 JPS63187665(A) 申请公布日期 1988.08.03
申请号 JP19870019847 申请日期 1987.01.29
申请人 NEC CORP 发明人 SAITO AKIRA
分类号 H01L29/812;H01L21/338;H01L29/80 主分类号 H01L29/812
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