| 摘要 |
PURPOSE:To equalize the nonuniformity of the luminous power of a lightemitting element by detecting the brightness or quantity of luminous flux of the light- emitting element at a place separate from a light-emitting surface, controlling the quantity of a substance adhering onto the surface of the light emitting element and keeping the apparent luminous power conversion efficiency of each light-emitting element constant. CONSTITUTION:A susceptor drive section 5 moves a susceptor 2 by a signal from an adjusting section 16, and an LED element not processed is mounted onto a through-hole 4. The LED element is energized by a constant current power supply 7, and emits light. The light emission is detected by a photodiode 13, and input to the adjusting section 16, an excess over a preset value of a signal corresponding to the brightness or quantity of luminous flux of the LED element is judged, and the opening and closing of a shutter 11 for a shutter drive section 12 are controlled. Accordingly, the quantity of flying toward the through-hole 4 of aluminum vapor from a crucible 9 is adjusted, thus controlling the quantity of aluminum evaporating onto the light-receiving surface of the LED element. The quantity of aluminum is regulated until the signal from the photodiode coincides with the preset value. |
