摘要 |
PURPOSE:To obtain an ultrasonic motor driven by a low voltage with small size and light weight without reducing the mechanical strength of a moving element by employing a honeycomb structure for the element. CONSTITUTION:An embodiment will be described. Upper and lower surface plates 4, 5 are made of stainless steel SUS22, and have 50mm of outer diameter and 1mm of thickness. Side plates 6 are made of similar material, and has 0.5mm of thickness. A honeycomb core 7 is made of aluminum in such a manner that one core is a hexagonal post with 4mm of one side length. The core 7, the upper and lower surfaces plates 4, 5 and the side plates 6 are bonded with an epoxy adhesive. According to this structure, the weight can be reduced by approx. 25% as compared with a rotor made of stainless steel SUS22 of the same size. When a piezoelectric element 3 is formed on an elastic unit 2, it is deposited by a sputtering method approx. 5mum thick. |