| 摘要 |
<p>PURPOSE:To obtain an apparatus for removing a reactive material such as halogen for which the time of filter replacement can properly be known by providing a temperature sensor that detects a temperature change due to the exothermic reaction at the time of adsorbing a reactive material. CONSTITUTION:To an apparatus for removing a reactive material having an adsorbent 3 which adsorbs a reactive material and exothermically reacts, a temperature sensor 4 is provided which senses a temperature change due to said exothermic reaction. For instance, a halogen gas filter F of an excimer laser device is constructed by providing a gas inlet 1a and a gas outlet 1b at both ends of a filter container 1, and placing within the container 1 the adsorbent 3 such as particulate activated carbon, soda lime or zeolite which is highly reactive with halogen by sandwiching it with particulate filters 2a, 2b comprised of a mole-like metal or the like. And at the end part of the adsorbent 3 at the gas outlet 1b side, the temperature sensor 4 is provided which consists of a thermocouple, resistance thermometer, thermistor or the like and outputs an electrical signal corresponding to a temperature, and its output is connected to an alarm lamp, alarm buzzer or the like.</p> |
