ELECTROPHOTOGRAPHIC SENSITIVE BODY

摘要

PURPOSE:To improve the traveling property of a carrier in a surface layer by alternately laminating thin amorphous Si films and thin amorphous Si films contg. N, thereby forming the surface layer. CONSTITUTION:A photoconductive layer 3 and the surface layer 4 are formed on a conductive base 1. The layer 4 is formed into the superlattice structure alternately laminated with the thin amorphous Si (a-Si:H) films and thin amorphous Si (a-SiN:H) films contg. N respectively to 30-500Angstrom film thicknesses. >=1 Kinds of elements belonging to group III or V of periodic table are incorporated into this layer 4. The layer 3 is preferably formed of a-SiH or muc-Si:H. A barrier layer 2 consisting of a-Si:H, muc-Si or a-BN:H is preferably provided between the base 1 and the layer 3.