| 摘要 |
PURPOSE:To prevent the generation of a flare due to a reflection by an edge of an aperture diaphragm, by providing the aperture diaphragm on an adjacent position on a position of a condensing point group by many condensing member elements for forming a condensing point group forming means. CONSTITUTION:A luminous flux from a light source means 10 for supplying a collimated luminous flux forms plural condensing points 10a on a plane A by an optical integrator 1 being a condensing point group forming means constituted of may bar-like elements 11. Also, on its position, an aperture diaphragm S1 is provided. The luminous flux which has been controlled to a desired light quantity and a sigma value of a prescribed value by the diaphragm S1 passes through a condenser lens 6, illuminates on a reticle R, and illuminates a wafer W through a projection lens. In such a way, by using the aperture diaphragm having an edge constituted so as not to exist in a position of the condensing point, the generation of a flare due to a reflection by the edge of the aperture diaphragm can be reduced. Also, the possibility of a breakdown of the aperture diaphragm caused by using a light source having a strong intensity can be eliminated.
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