| 摘要 |
PURPOSE:To enhance measuring accuracy by permitting no reception of the auxiliary beam path of irradiation beam due to a concaved shape by a sensor, by a method wherein an angle changing mechanism is formed of a biaxial constitution consisting of the rotary axis in a plane, which is right-angled to the irradiation optical axis of a beam spot position detecting sensor and contains the irradiation optical axis and a beam receiving axis, and the rotary axis passing the intersecting point of the rotary axis and the irradiation optical axis and right-angled to said two axes. CONSTITUTION:An angle changing mechanism 2 is formed of a biaxial constitution consisting of a rotary axis Z right-angled to the irradiation optical axis 8 of a beam spot detection sensor 1 and containing the irradiation optical axis 8 and a beam receiving axis 9, and a rotary axis Y passing the intersecting point P of the rotary axis Z and the irradiation optical axis 8 and right-angled to said two axes. This mechanism 2 is combined with a three- dimensional drive mechanism 3 to constitute a non-contact measuring system and an object 5 to be measured is placed on a moving table 4 moving in an X-direction. The beam from the beam source 3 is allowed to irradiate the P-point on the object 5 and the irregular reflected beam from the P-point is received by the beam receiving lens 10 arranged on a beam receiving optical axis 9 forming an angle gamma with respect to the irradiation optical axis 8 and detected by a beam receiver 11 to prevent the auxiliary beam path of irradiation beam due to a concave shape from being received by the sensor 1.
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