| 摘要 |
<p>PURPOSE:To contrive to be able to execute the measurement of a body to be measured at low cost and also, to make it possible to cope with immediately to trouble and so on as well to improve general-purpose properties by a method wherein the contact fingers of plural pieces of probe cards, which are distributed to circuit boards of more than two and are provided thereon, are brought into contact to the numerous measuring pads of the body to be measured to measure the electrical characteristics of the body to be measured. CONSTITUTION:Contact fingers 8 and 12 of plural pieces of probe cards 5 and 6, which are distributed to circuit boards of more than two for supporting the contact finger lines 8 and 12 of a tester and are provided thereon, are brought into contact to the numerous measuring pads of a body 2 to be measured and the electrical characteristics of the body 2 to be measured are measured by the tester in the contact state. For example, in case the electrical characteristics of the glass substrate 2 formed with a liquid crystal panel for image display are measured, the second probe card 6 is superposed on the first probe card 5 to install. First, a continuity measurement is executed in a state that the probes 8 of the probe card 5 are brought into contact to electrodes on the substrate 2. Then, a measuring stage 9 is moved upward in the vertical direction, the probes 12 of the probe card 6 are brought into contact to the electrodes on the substrate 2 and a continuity measurement is executed in a contact state.</p> |
