| 摘要 |
PURPOSE:To permit measurement of a wide range of humidity with high accuracy by dispersing carbon particles into a sol formed by hydrolyzing silicon alkoxide and gelling the sol in the form of a film on a substrate produced by gelling a silica sol and drying the gel. CONSTITUTION:The conductive particles are dispersed at 0.1-10 molar ratio, for example, C/Si(OR4) (R: alkyl group) in the sol formed by hydrolyzing the silicon alkoxide and such sol is gelled in the form of the film on the substrate produced by gelling the silica sol and drying the gel. The gel is then dried and sintered. Since the dried gel and sol bond securely to each other, the film does not crack and peel. Since the died gel is quartz glass after sintering, the gel withstands severe environment. The measurement of a wide range of humidity with high accuracy is thus permitted.
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