| 摘要 |
PURPOSE:To obtain a silicon substrate containing a mixed metal, consisting of a single crystal silicon containing the metal and having excellent mechanical strength, toughness and fatigue strength. CONSTITUTION:A metal 2 selected from beryllium copper, phosphor bronze, Al, Ti, Mg, Pb, Cr and Mo is evaporated or deposited on a face applying heat diffusion of a single crystal silicon substrate 1 and heated at 700-1,500 deg.C to heat-diffuse the metal 2 into the substrate 1.
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