发明名称 POLISHER FOR THIN FILM MAGNETIC HEAD
摘要 PURPOSE:To improve the polishing precision by charging a plurality of particle- shaped spacers having the equal diameter to the thickness after the hardening of adhesive into the adhesive, thus obtaining the equal distance from a jig on a basic plate attached onto the jig through the adhesive, at any position. CONSTITUTION:The thickness K of an adhesive 21 after hardening is nearly equal to that of a spacer 22 in particle form. Therefore, the distance between all the region of the upper surface 21a of the adhesive 21 and the upper surface 19a of a working standard mark 19 pattern-printed on the right and left outsides of a thin film head element formed on a basic plate 1 is made uniform. Also the distance M between all the region of the undersurface 21b of the adhesive 21 and all the region of the installation surface 23 of a jig 16 onto a surface plate 18 is made uniform similarly. Therefore, the distance between the installation surface 23 and the upper surface 19a of the working standard mark 19 is made uniform at any position, and the need of adjusting the distance before polishing work is avoided, and the thin film head element on the basic plate 1 can be polishing-worked with high precision.
申请公布号 JPS63185572(A) 申请公布日期 1988.08.01
申请号 JP19860209293 申请日期 1986.09.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 UCHIUMI HIROSHI
分类号 B24B49/02;G11B5/31 主分类号 B24B49/02
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