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发明名称
MICROINTERFEROMETER FOR MEASURING SURFACE ROUGHNESS
摘要
申请公布号
SU1413417(A1)
申请公布日期
1988.07.30
申请号
SU19874219831
申请日期
1987.02.19
申请人
SOLODUKHO FAINA M,SU;SHMAEV IGOR V,SU
发明人
SOLODUKHO FAINA M,SU;SHMAEV IGOR V,SU
分类号
G01B11/30
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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