| 摘要 |
PURPOSE:To prevent the contamination of a wire-shaped evaporating material in the stage of evaporating said material by an electron beam by supplying said material through a tubular cover and retracting the material into the cover after melting the same into a crucible. CONSTITUTION:A wire-shaped evaporating material 6 which is kept under a cover 4 of a feed mechanism and is wound around a reel 5 is drawn out to the irradiating position of an electron beam 3 in the upper part of a crucible 2 provided to a substrate 1 and is supplied through a guide 8 so that the material is melted and evaporated in the crucible 2. The material 6 is supplied through a tubular cover 10 upon emerging from the guide 8 and after the melting of the material 6 into the crucible 2 is finished, the material is retracted to the position of the guide 8, by which the contamination of the wire-shaped vapor deposition source 6 by the scale and gas adsorption during evaporation is prevented and the supply of the material 6 is smoothly accomplished. |
