| 摘要 |
PURPOSE:To enhance the efficiency of utilization of excited light by placing reflecting mirrors in front of windows for light incidence and emergence at the outside of a vacuum vessel so as to cause the multipath reflection of the excited light passing through the vacuum vessel. CONSTITUTION:Excited light emitted from a light source 4 for excitation is passed through a window 9 for light incidence fitted to a vacuum vessel 1 by an optical system 5, 6 for introducing excited light and passes through the vacuum vessel 1, where the excited light causes a CVD reaction to form a thin film on a substrate. The excited light further passes through a window 10 for light emergence and is incident on a reflecting mirror 8. The excited light reflected by the mirror 8 enters the vessel 1 again through the window 10 and emerges from the window 9. This emerged light is reflected by a reflecting mirror 7 and enters the vessel 1 again. After those actions are repeated, the excited light emerges finally from the vessel 1.
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