PRODUCTION OF ELECTRICALLY CONDUCTIVITY TRANSPARENT FILM

摘要

PURPOSE:To obtain an electrically conductive transparent film made of a homogeneous tin oxide film without thermally damaging the surface of a base material by simultaneously causing the photochemical reaction of reactive gases in a vapor phase and the thremochemical reaction by the heating of the base material. CONSTITUTION:Laser beams 3 from a first laser beam generator 1 and laser beams 4 from a second laser beam generator 2 are radiated on glass as a base material 11 in a chamber 8 through reflecting mirrors 5, condensers 6 and a window 7 so that the radiation positions on the surface of the base material 11 are allowed to nearly coincide with each other. Tetramethyl tin [Sn(CH3)4] used as a tin compd. 15 is bubbled with gaseous Ar 13 and jetted on the base material 11 together with O214 as a mixture 10 of reactive gases contg. tin. from the reactive gas feed nozzle 9. The tetramethyl tin as one of the reactive gases on the base material 11 is optically excited by absorbing the first laser beams having oscillation line within the ultraviolet region. The glass as the base material 11 absorbs the second CO2 laser beams and a thermal reaction is accelerated on the locally heated base material 11 to deposit a tin oxide film.