| 摘要 |
PURPOSE:To prevent direct arrival of bumping particles of a material for vapor deposition at a surface for vapor deposition by forming perforated cylindrical resistance heating element of a chimney type heating boat into double cylinders, covering the specific part thereof with heat resistant fibers and heating the innermost resistance heating elements to the max. temp. CONSTITUTION:The perforated cylindrical resistance heating elements 2, 2' are concentrically disposed in parallel in a cylindrical vessel 1. The inside of the heating element 2 and the outside of 2' are melted by heating and are covered with meshes 8 made of the heat resistant fibers. The material for vapor deposition is housed into a housing part 3 in the spacing between the inside wall of the vessel 1 and the heating element 2 and a voltage is impressed between the vessel 1 and the heating elements 2, 2' via conductors 4, 5. The heating elements 2, 2' and the meshed 8 are thereby made to generate heat quickly and the material for vapor deposition is heated to evaporate. The vapor thereof passes the through-holes of the elements 2, 2' and the meshes 8 and is released through the aperture 7 of a cap 6 to the outside. Splashing of the bumping particles of the material for vapor deposition is substantially prevented by the meshes 8 even if said material bumps and the bumping particles thereof partly pass the through-holes of the element 2. The particles collide against the meshes 8 of the element 2' even if said particles splash. The probability that the particles are released directly from the aperture 7 is therefore smaller.
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