FORMATION OF ELECTRICALLY CONDUCTIVE CARBON FILM

摘要

PURPOSE:To obtain a carbon film having high electrical conductivity even when the temp. of a base material is lower than the conventional temp., by forming a carbon film on the base material heated to a relatively low temp. by an ion beam process with a hydrocarbon as starting material. CONSTITUTION:A quartz base material 7 is fitted to a base material holder in a chamber 1 and the chamber 1 is evacuated to 1-2X10<-4>mmHg with an evacuating device composed of a rotary oil pump 20 and a diffusion oil pump 21. A hydrocarbon as starting material 2 is jetted from the nozzle 6 of a crucible 3 and voltage of several ten - several hundred volts is impressed between an electron emitting filament 12 and an electron accelerating electrode 16 to emit electrons toward beams 15 of the starting material and to ionize the starting material. This ionized starting material is accelerated toward the base material 7 heated to 400-<900 deg.C by an ion accelerating electrode 13. Thus, a carbon film having superior electrical conductivity is formed on the surface of the base material 7 at the relatively low temp. Methane or ethane may be used as the hydrocarbon.