METHOD FOR MANUFACTURING A MEASURING TRANSDUCER FOR MEASURING MECHANICAL QUANTITIES

摘要

A base member (36) of insulating material carrying a semiconductor element (31) contains channels (37) lined with electrically conducting material acting as conductors for the detected signals. The conducting material extends up to contacts (39) in the semiconductor element and is glued, soldered or bonded by thermo-compression to the contacts. A diaphragm section (30) in the semiconductor element pref. lies above a recess (33) in the base member. The recess has a raised central part which comes into contact with the diaphragm if there is excessive deflection.