| 摘要 |
PURPOSE:To prevent the deterioration of a soln. reservoir due to the flaws caused by edge growth and the variations in the carrier concn. due to the remaining of a dopant by using a cartridge as the soln. storage hold for storing a growth soln. to separately detach the cartridge from the main soln. reservoir body. CONSTITUTION:The device has the following structure. Namely a slider 11 for housing a substrate 12 and the soln. reservoir 13 placed on the slider 11, capable of being relatively slid with respect to the slider 11, and provided with plural through holes are provided. The detachable soln. storage hole cartridge 14 provided with a through hold for storing the growth soln. 15 is inserted into the plural through holes of the soln. reservoir 13.
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