发明名称 |
EXPOSURE ARRANGEMENT FOR THE PRODUCTION OF MASKS |
摘要 |
An exposure arrangement for use in a computer-aided design system to produce masks. The arrangement includes a cathode-ray tube which produces an image of the mask on the screen of the tube, and an optical system which projects the image of the mask onto a substrate which is to be exposed. The cathode-ray tube is a high-brightness tube in which the screen is provided with a phosphor which emits in an ultraviolet spectrum and with a cooling circuit for the phosphor. The optical system is designed for use in the ultraviolet spectrum and operates on the ultraviolet image provided by the screen of the high-brightness tube. |
申请公布号 |
ZA8608596(B) |
申请公布日期 |
1988.07.27 |
申请号 |
ZA19860008596 |
申请日期 |
1986.11.12 |
申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
VALERE DUCHENOIS |
分类号 |
H01L21/30;G03B15/00;G03F7/20;H01J31/08;H01L21/027 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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