| 摘要 |
<p>A nozzle plate (5) in which a nozzle (4) through which fluid can pass is formed is prepared, and an insulator layer (14) is located in layer on the nozzle plate (5) except a location of the nozzle (4). An electrode plate (11) is provided so as to cover the insulator layer (14), and a valve beam (19) made of a conductive substance is located in an opposing relationship to the nozzle plate (5). A valve for opening and closing said nozzle (4) is formed at a yieldable portion of the valve beam (19) opposing to the nozzle (4). Upon energization of the electrode plate (11) and the valve beam (19) of a valve element thus produced, the valve is attracted toward the electrode plate (11) to open or close the valve. Binary control of the valve to fully open or fully close the nozzle and infinite control of the valve to infinitely open or close the nozzle can be readily attained in the valve element.</p> |
