发明名称 SAMPLE DEVICE FOR CHARGED PARTICLE BEAM DEVICE
摘要 PURPOSE:To reduce the number of times of the sample exchange and shorten the time required for the sample exchange as a whole by allowing a sample holder to pass a gate valve having a small diameter even when many samples are held by the sample holder. CONSTITUTION:When a lever 20 is held at a position 'A', a holder receiver 26 and a sample holder 30 are located in a sample exchanging chamber 3 and faced to the direction of the figure (a) against the opening of a gate valve V. When the lever 20 is rotated by 90 deg. along a guide groove 29a, a rotor 19 is rotated by 90 deg., thereby this rotation is transmitted to a rotary shaft 16, bevel gears 17, 21, and flat gears 23, 24, and finally the holder receiver 26 is rotated. Under this condition, the longitudinal direction of the holder 30 is along the inserting direction of a sample moving pipe 14. When the lever 20 is moved to a position 'B', the sample holder 30 passes the gate valve V1 and reaches a sample processing chamber not shown in the figure. Accordingly, even if the diameter of the gate valve V1 is made small, the sample holder 30 holding many samples can pass it.
申请公布号 JPS63181253(A) 申请公布日期 1988.07.26
申请号 JP19870013451 申请日期 1987.01.23
申请人 JEOL LTD 发明人 NAKANO MASAMICHI
分类号 H01J37/20;H01J37/18 主分类号 H01J37/20
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