| 摘要 |
PURPOSE:To obtain a stable long-life ion beam even for a high-vapor pressure metal by providing a foaming agent made of a metal having a melting point higher than that of the metal to be ionized at the opening section of a crucible and allowing the ionization metal to penetrate through it. CONSTITUTION:The current from an electrical heating power supply 6 flows through a crucible 3, an ionization metal 2, and a foaming agent 1 from above the crucible 3 and is returned to the electrical heating power supply 6. The ionization metal 2 is heated end converted into a liquid and penetrates through the foaming agent 1 made of a metal having a melting point higher than that of the ionization metal 2 and flows out from its tip section. The ionization metal 2 is ionized and extracted by an extracting electrode 9 as an ion beam 10. The extracted ion beam 10 is accelerated by the voltage applied by an accelerating power supply 8.
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