发明名称 |
Wavelength scanning interferometry and interferometer employing laser diode |
摘要 |
In an interferometry wherein a light beam from a light source is divided in two, one of which is used as a reference beam and the other beam is used as an inspecting beam, and the two beams are projected again on an identical plane so as to form an interference pattern; a wavelength scanning type laser diode interferometry characterized in that a laser diode is employed as the light source, and that an injection current of the laser diode is modulated thereby to scan a wavelength of the laser diode and to change an intensity distribution of the interference pattern.
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申请公布号 |
US4759628(A) |
申请公布日期 |
1988.07.26 |
申请号 |
US19860826341 |
申请日期 |
1986.02.05 |
申请人 |
HITACHI, LTD. |
发明人 |
TATSUNO, KIMIO;TSUNODA, YOSHITO;OHTAKE, MASATOSHI;KATAOKA, KEIJI;YONEZAWA, SEIJI |
分类号 |
G01J9/02;G01B9/02;G01J3/45;G01J9/04;(IPC1-7):G01B9/02 |
主分类号 |
G01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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