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发明名称
Ion source
摘要
申请公布号
US4760262(A)
申请公布日期
1988.07.26
申请号
US19870049759
申请日期
1987.05.12
申请人
EATON CORPORATION
发明人
SAMPAYAN, STEPHEN E.;KING, MONROE L.;MOORE, ROBERT A.
分类号
H01J27/20;H01J27/08;H01J37/08;(IPC1-7):H01J27/00
主分类号
H01J27/20
代理机构
代理人
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