| 摘要 |
PURPOSE:To unify the ion extraction, safely hold a sample dish, and allow the sample having a different height to be used by bringing a cathode into uniform contact with the bottom of the sample dish and pressing the sample dish to a packing with a spring. CONSTITUTION:When a sample dish 5 is mounted on a cathode 1, the cathode 1 is brought into uniform contact with the bottom of the sample dish 5 by a spring 2, and the sample dish 5 is pressed to a packing 6. Next, gas is fed through a guide port 13 and discharged through a discharge port 14, and plasma is generated in a chamber 9 by a high-frequency power supply 11 via a coil 12. Since the cathode 1 is in uniform contact with the sample dish 5 and connected to the ground, ions 16 can be uniformly extracted into the sample dish 5. In addition, since the sample dish 5 is pressed to the packing 6 by the spring 2, sealing is ensured, and the sample dish 5 is not dropped even if the chamber 9 is opened to the atmosphere.
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