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发明名称
TRANSFER APPARATUS
摘要
申请公布号
JPS63181182(A)
申请公布日期
1988.07.26
申请号
JP19880000048
申请日期
1988.01.04
申请人
FUEEZU TSUU AUTOM
发明人
YUUJIN EDOWAADO REISU
分类号
B25J15/08;G11B23/00;H01L21/677;H01L21/68
主分类号
B25J15/08
代理机构
代理人
主权项
地址
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