| 摘要 |
PURPOSE:To contrive to be able to obtain a high pulse-repetition number by a method wherein auxiliary electrodes are formed into a flat plate shape and also, their plate surfaces are arranged in the same direction as the flow direction of a gas laser medium. CONSTITUTION:Auxiliary electrodes 30-39 are formed in a streamline shape and also, the directions of their plate surfaces are respectively arranged in the same direction as the flow direction (a) of a gas laser medium. Accordingly, the gas laser medium flows in a uniform state having little loss of its flow velocity and also, having little turbulance of its flow velocity distribution between main discharge electrodes 6 and 7. Moreover, even though the flow velocity of the gas laser medium is not set at a so high velocity, the gas laser medium between the main discharge electrodes 6 and 7 can be immediately replaced with a new one and with the generating probability of an arc discharge very decreased, a uniform discharge can be generated between the electrodes 6 and 7. Thereby, even though a pulse-repetition number is increased, the flow of the gas laser medium holds a uniform state and a pulse laser beam can be generated in a stable state. |
