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发明名称
摘要
申请公布号
JPS63115156(U)
申请公布日期
1988.07.25
申请号
JP19870006969U
申请日期
1987.01.22
申请人
发明人
分类号
G03G15/04;G03G15/043;G03G15/047;H01L33/60;H01L33/62;(IPC1-7):G03G15/04;H01L33/00
主分类号
G03G15/04
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