| 摘要 |
PURPOSE:To easily measure the shape of a groove at a high speed, for example, even by a personal computer, by constituting the title apparatus so as to perform data processing using harmonic analysis. CONSTITUTION:A turntable 2 is connected to a transmitting device 11 and provided with an angle detector and a measuring element 3 is brought into contact with the groove of the object 1 to be measured supported by the turntable 2 to perform linear motion. A linear gauge 10 detects the displacement quantity of the measuring element 3 and a control apparatus 25 makes the deviation of the measured value by the gauge 10 and a theoretical value approximate to a sine curve using a technique of harmonic analysis, and the eccentric quantity and eccentric direction of the turntable 2 and the object to be measured are calculated from the amplitude and phase of said curve to remove an eccentric component from the measured value. Then, the measuring element 3 is provided on the tangential line of an involute fundamental circle C and a scroll shape S is rotated around a center axis while the measuring element 3 is brought into contact with the scroll shape S to evaluate a surface processing property. Herein, the displacement of the measuring element 3 is made proportional to an angle theta of rotation when the shape S is ideally processed.
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