| 摘要 |
PURPOSE:To make it possible to prevent a shade from being generated and also peripheral quantity of light from being decreased by providing an observation optical system provided with a half-mirror between an objective lens and an image pickup lens and also providing a photo-pickup optical system behind the half-mirror. CONSTITUTION:An observation optical system 8 is provided between a fluorescent multiplier tube 4 and an image pickup tube 7, while the system 8 being provided with a half-mirror 21 between an objective lens 9 and an image pickup lens 10 in order to bend the image pickup tube 7 in relation to the fluorescent multiplier tube 4 at a predetermined angle. A photo-pickup optical system 22 is provided behind the half-mirror 21, the system 22 being connected to a X-ray generation control device 18 so as to measure an illuminance of the predetermined part of a sample 2 to be observed by gathering a part of flux of light transmitted through the half-mirror 21. Therefore, it is possible to solve such a problem of observation that the shade of a photo-pickup is reflected on a part of a object to be photographed and also to prevent peripheral quantity of light around the object to be photographed from being decreased.
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