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发明名称
ION IMPLANTATION
摘要
申请公布号
AU6760887(A)
申请公布日期
1988.07.21
申请号
AU19870067608
申请日期
1987.01.15
申请人
VSESOJUZNY NAUCHNO-ISSLEDOVATELSKY INSTRUMENTALNY INSTITUT
发明人
VIKTOR PETROVICH ZHED;ALEXEI GEORGIEVICH GAVRILOV;ELENA IVANOVNA KURBATOVA;ANDREI KARLOVICH SINELSCHIKOV;ALBERT MIKHAILOVICH BOYARUNAS;VITALY MIKHAILOVICH SMIRNOV
分类号
C23C14/02;C23C14/16;C23C14/32;C23C14/58
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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