发明名称 ILLUMINATION LIGHT ADJUSTING APPARATUS
摘要 PURPOSE:To adjust illumination light into the optimum image signal, by arranging a filter (FL) having a plurality of shutter elements (SE) in a light path and controlling the shutter elements on the basis of the image signal from a detection means for detecting the image of an object. CONSTITUTION:A liquid crystal FL 5 having a large number of SEs two- dimensionally arranged thereto is arranged in a light path irradiating an object. SEs are constituted so that the change-over of the transmitting and blocking states thereof is respectively independently controlled and this control is performed on the basis of the image signal from a TV camera 8 due to a liquid crystal pattern control apparatus 9 and, for example, one of random dot patterns 5a-5c is generated on FL 5. These patterns 5a, 5b, 5c are stored in a memory as liquid crystal pattern signals 1-N. Then, the quantity of illumination light is judged on the basis of the image signal of the camera 8 and a signal for obtaining the optimum image signal from the signals 1-N is outputted to FL 5 as an FL control signal through a change-over selection part 14. Therefore, FL 5 forms a light blocking part and a light pervious part to the pattern corresponding to one of the patterns 5a-5c.
申请公布号 JPS63177005(A) 申请公布日期 1988.07.21
申请号 JP19870009444 申请日期 1987.01.19
申请人 CANON INC 发明人 OOKOUCHI HIROKI
分类号 G03F9/00;G01B11/00;H01L21/027;H01L21/30;H01L21/68 主分类号 G03F9/00
代理机构 代理人
主权项
地址