| 摘要 |
PURPOSE:To obtain an amorphous alloy film having high saturated magnetic flux density, excellent thermal stability and approximately zero of magnetostrictive constant by setting the crystallizing temperature of a first amorphous film higher than that of a second amorphous film in a composite amorphous film which has the first amorphous film as a base film and the second amorphous film as a main magnetic film. CONSTITUTION:In a laminated amorphous film which has a first amorphous film as a base film 2 and a second amorphous film as a main magnetic film 3, the crystallizing temperature Tx1 of the film 2 is larger than that Tx2 of the film 3. The film 3 may be of an Fe amorphous film or a Co amorphous film, but the Co amorphous film causes a larger effect. The film 2 may be of a ferromagnetic film containing different element from that of a nonmagnetic film or the film 3. However, it is desired to compose the films 2, 3 of the same elements in view of the bondability of the film 2 to the film 3 and the chemical stability thereof. The thickness of the film 2 is suitably 30-500Angstrom . |
