发明名称 DETECTION OF DEVIATION BETWEEN PRINTINGS ON FRONT AND REVERSE SURFACES
摘要 PURPOSE:To perform exact detection for slight man-hours and time and to improve productivity, by performing both surface etching on an element material on which measuring patterns can be formed separably and then separating the measuring patterns and next measuring the thickness directional shapes of peripheral surfaces of test pieces which are bent upward. CONSTITUTION:A plurality of lead frames 2 and measuring patterns 3 are formed on an element material 1. The measuring patterns 3 are separated from the element material 1 on which both surface etching is performed and next test pieces 4 are bent upwards at 90 deg.. Otherwise, after the test pieces 4 are bent upwards at 90 deg., the measuring patterns 3 are separated from the element material 1, and the thickness directional shapes of peripheral surfaces of the test pieces 4 are measured as lines on two positions in the direction parallel with surfaces of the test pieces 4 (in the direction vertical to surfaces of the measuring patterns 3) by the use of a measuring microscope, so that printing shifts on both the front and the rear can be detected. At that time cross-sectional shapes of the test pieces 4 are seen as shown in a figure (a) when the printing shifts are generated, and their shapes are seen as shown in a figure (b) when the printing shifts are not generated.
申请公布号 JPS63177535(A) 申请公布日期 1988.07.21
申请号 JP19870009670 申请日期 1987.01.19
申请人 SUMITOMO METAL MINING CO LTD 发明人 YOSHIDA KAN
分类号 H01L21/66;G01B5/00;G01B21/00;H01L23/50 主分类号 H01L21/66
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