发明名称 METHOD OF REDUCING ALPHA PARTICLE EMISSIONS FROM A CERAMIC MATERIAL
摘要 From a surface layer of a ceramic material including particles of metallic oxides bonded together by a siliceous material containing alpha particle emitters. The siliceous material and thereby said alpha particle emitters contained therein are removed preferably by etching in an HF-solution, whereas the metallic oxides are not considerably attacked or decrease their adhesion to the ceramic material respectively. By this method failures in electronic devices connected to the ceramic material are practically eliminated, since alpha particle sources deeper in the ceramic material pose a far lesser threat to the device because these relatively low energy, high volume particles suffer a substantial attenuation as they pass through the metallic oxide particles.
申请公布号 DE3472098(D1) 申请公布日期 1988.07.21
申请号 DE19843472098 申请日期 1984.06.28
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HOFFMAN, HERMAN SOL;HOWARD, ROBERT TURNER, JR.
分类号 C04B41/53;C04B41/91;H01L21/48;H01L23/08;(IPC1-7):C04B41/91;H01L23/54 主分类号 C04B41/53
代理机构 代理人
主权项
地址